Abstract: |
Due to the edge effect of the electrode plate of the capacitive sensor, there is an additional capacitance at the edge, which reduces its sensitivity and produces nonlinearity, affecting the output characteristics of the sensor. In order to study the output characteristics of the combined differential cylindrical surface capacitance tilt sensor considering edge effects, the conformal transformation method, Green’s function method, and computer numerical simulation are combined. Firstly, the output characteristics of one group of differential sensors in the combined differential cylindrical surface capacitor are discussed, and ways to improve the output characteristics of this group of sensors are pointed out. Then, based on the output characteristics of this group of sensors, this paper studies the output characteristics of a combined differential cylindrical capacitive tilt sensor. Theoretical analysis and numerical simulation results indicate that there are five ways to improve the output characteristics of the combined differential cylindrical capacitive tilt sensor: firstly, make the rotation equal to the center angle of the circle opposite the fixed electrode plate; Secondly, reduce the center angle between the two fixed electrode plates; Thirdly, increase the radius of the rotating and fixed electrode plates and reduce their difference; Forthly, increase the value of the center angle of the circle to π/2 when the center angle of the rotating and fixed electrode plate is equal, so as to increase the measurement range of the sensor to π/2; Fifthly, moderately increase the number of units in this combination sensor. This study not only provides a new method for calculating the capacitance of capacitive sensors considering the edge effect of the electrode plate, but also eliminates the influence of the lateral edge effect of the electrode plate on its output characteristics, improves the measurement accuracy of capacitive sensors, and provides a new approach for the design and research of sensors. It has certain theoretical significance and practical value in scientific research. |